Ultrasensitive nanomechanical mass sensor using hybrid opto-electromechanical systems
نویسندگان
چکیده
منابع مشابه
Nanomechanical mass sensor for spatially resolved ultrasensitive monitoring of deposition rates in stencil lithography.
Francesc Pérez-Murano, Julien Arcamone, Marc Sansa, Jaume Verd, Arantxa Uranga, Gabriel Abadal, Núria Barniol, Marc van den Boogaart and Juergen Brugger 1 Instituto de Microelectronica de Barcelona CNM-IMB (CSIC), Campus UAB, 08193 Bellaterra (Barcelona), Spain. 2 Dept.Electronics Engineering, Universitat Autonoma de Barcelona, ETSE-UAB, 08193-Bellaterra (Barcelona), Spain 3 Microsystems Labora...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2014
ISSN: 1094-4087
DOI: 10.1364/oe.22.013773